Evolution and dynamics of excimer laser vaporized YBa[sub 2]Cu[sub 3]O[sub 7-[delta]] plumes
Pulsed laser deposition of thin films is a technology whose fundamental processes are often poorly understood. Because of the difficulty of monitoring in real time either the ablation process itself (the laser-solid interaction), or thin film growth (plume-substrate interaction), studies have largely relied on diagnostic studies of the ablated plume and the resulting film to infer details about other steps in the process. Information gained from this approach has helped improve the production of high-temperature superconducting thin films. We have studied plume dynamics during the in-situ pulsed laser deposition of YBa[sub 2]Cu[sub 3]O[sub 7-[delta]] thin films. The 248 and 308 nm lines of an excimer laser were used to generate a plume from a bulk YBa[sub 2]Cu[sub 3]O[sub 7-[delta]] target. Both fast intensified CCD imaging and spectral diagnostics were used to monitor plume dynamics. Variations in the plume distribution as a function of processing gas, pressure, fluence, energy, and spot size were monitored by film composition and spectral- and time-resolved imaging.
- Research Organization:
- Los Alamos National Lab., NM (United States)
- Sponsoring Organization:
- DOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-36
- OSTI ID:
- 6926231
- Report Number(s):
- LA-UR-92-4260; CONF-921101--49; ON: DE93005474
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
665412 -- Superconducting Devices-- (1992-)
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
DIAGNOSTIC TECHNIQUES
EMISSION
EXCIMER LASERS
FILMS
GAS LASERS
HIGH-TC SUPERCONDUCTORS
LASERS
OXIDES
OXYGEN COMPOUNDS
PLUMES
SUBSTRATES
SUPERCONDUCTING FILMS
SUPERCONDUCTORS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES