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The influence of ion implantation on the near-surface mechanical properties of ceramics

Conference ·
OSTI ID:6910913
;  [1];  [2]
  1. Oak Ridge National Lab., TN (USA)
  2. Tennessee Univ., Knoxville, TN (USA)

Ion implantation of ceramics such as Al{sub 2}O{sub 3} and SiC may produce a highly damaged but crystalline surface layer or an amorphous surface. The specific structure depends upon the implantation parameters. Studies using microindentation techniques show that a crystalline implanted surface has a higher hardness (by 10 to 50%) than the corresponding unimplanted crystal but the elastic modulus is essentially unchanged. The hardness and elastic modulus of amorphous implanted surfaces are less than those of the crystalline material. Estimates of the residual stress have been obtained from microindentation tests. 20 refs., 8 figs.

Research Organization:
Oak Ridge National Lab., TN (USA)
Sponsoring Organization:
DOE/ER
DOE Contract Number:
AC05-84OR21400
OSTI ID:
6910913
Report Number(s):
CONF-900466-14; ON: DE90010139
Country of Publication:
United States
Language:
English