Outgassing characteristics and microstructure of an electropolished stainless steel surface

Journal Article · Thu Mar 01 04:00:00 EST 1990 · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)

DOI:https://doi.org/10.1116/1.576897· OSTI ID:6910167

Yoshimura, N; Sato, T; Adachi, S; Kanazawa, T ^[1]

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1. JOEL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo 196, Japan (JP)

Outgassing characteristics of an electropolished stainless steel (304) pipe wall were investigated by an isolation method. The free outgassing rate after an {ital in} {ital situ} bakeout (150 {degree}C, 20 h) was estimated as low as 1.6{times}10{sup {minus}12} Pa l s{sup {minus}1}cm{sup {minus}2}. After the {ital in} {ital situ} bakeout, H{sub 2} molecules were steadily evolved from the pipe wall, whereas most of CO, C, CH{sub 4}, and CO{sub 2} molecules were emitted from the operating mass spectrometer and Bayard--Alpert gauge with incandescent filaments. Auger depth profile analysis revealed that the oxide layer of an electropolished surface was cleaner, thinner, and finer in microstructure than that of a buff-polished surface. This is the reason why an electropolished surface showed a very low outgassing rate.

• OSTI ID: 6910167
• Journal Information: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Journal Name: Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA) Vol. 8:2; ISSN JVTAD; ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ALKANES
ALLOYS
AUGER ELECTRON SPECTROSCOPY
AUSTENITIC STEELS
CARBON
CARBON COMPOUNDS
CARBON OXIDES
CHALCOGENIDES
CHROMIUM ALLOYS
CHROMIUM-NICKEL STEELS
CORROSION RESISTANT ALLOYS
CRYSTAL STRUCTURE
ELECTROLYSIS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELECTROPOLISHING
ELEMENTS
HEAT RESISTANT MATERIALS
HEAT RESISTING ALLOYS
HIGH ALLOY STEELS
HYDROCARBONS
HYDROGEN
IN-SITU PROCESSING
IRON ALLOYS
IRON BASE ALLOYS
LYSIS
MATERIALS
METHANE
MICROSCOPY
MICROSTRUCTURE
NICKEL ALLOYS
NONMETALS
ORGANIC COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
POLISHING
PROCESSING
SCANNING ELECTRON MICROSCOPY
SPECTROSCOPY
STAINLESS STEEL-304
STAINLESS STEELS
STEEL-CR19NI10
STEELS
SURFACE FINISHING
SURFACE TREATMENTS