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Compact ECR ion sources with permanent magnets in a cusp geometry and in a magnetic mirror structure

Conference · · Review of Scientific Instruments; (USA)
OSTI ID:6908364
 [1]
  1. Commissariat a l'Energie Atomique, Centre d'Etudes Nucleaires de Grenoble, Departement de Recherche Fondamentale, 85 X, 38041 Grenoble Cedex, France (FR)
Two compact Electron Cyclotron Resonance (ECR) ion sources exclusively built with permanent magnets in a cusp geometry and in a magnetic mirror structure are compared. The microwave discharge power is 60--120 W at a frequency of 2.45 GHz. The cusp structure enables to produce an argon-ion current of 1.5 mA at an extraction voltage of 2 kV with an aperture of 4 mm diameter at a gas pressure of 10{sup {minus}3} mbar. The ion source built with a magnetic mirror operates at lower pressure (10{sup {minus}4} mbar) with an ion current density of 5 mA/cm{sup 2} (the total current is 0.6 mA). Spectroscopic measurements of photons emitted by an oxygen plasma enable us to detect multicharged ions such as O{sup 4+} and O{sup 5+} ions. With these two magnetic structures, sharp variations of current density with gas flow rates are observed and the different ranges of operating pressure are presented.
OSTI ID:
6908364
Report Number(s):
CONF-890703--
Conference Information:
Journal Name: Review of Scientific Instruments; (USA) Journal Volume: 61:1
Country of Publication:
United States
Language:
English