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Characterization of buried thin films with resonant soft x-ray fluorescence

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.115483· OSTI ID:69034
; ;  [1]; ;  [2]; ;  [3];  [4];  [5];  [6]
  1. Lawrence Livermore National Laboratory, Livermore, California 94550 (United States)
  2. Lawrence Berkeley Laboratory, Berkeley, California 74720 (United States)
  3. University of Tennessee, Knoxville, Tennessee 37996 (United States)
  4. Tulane University, New Orleans, Louisiana 70118 (United States)
  5. IBM Research Division, Thomas J. Watson Research Center, Yorktown Heights, New York 10598 (United States)
  6. IBM Research Division, Almaden Research Center, San Jose, California 95120 (United States)

The geometric and electronic structure of a buried monolayer of boron nitride (BN) has been probed using resonant soft x-ray fluorescence (SXF). By using the strong {pi}* resonance feature in the resonant fluorescence spectrum near the {ital B} (1{ital s}) threshold, we were able to detect the BN thin film and examine changes in its electronic structure when the monolayer is placed between different materials. Our results demonstrate the capability of the resonant SXF technique for probing the element-specific electronic structure of a buried thin film nondestructively. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.

Research Organization:
Lawrence Berkeley National Laboratory
DOE Contract Number:
AC03-76SF00098
OSTI ID:
69034
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 1 Vol. 67; ISSN APPLAB; ISSN 0003-6951
Country of Publication:
United States
Language:
English

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