Investigation of a laser-plasma source of soft x rays operating at laser power densities 5 x 10/sup 11/--2 x 10/sup 14/ W/cm/sup 2/

Journal Article · Sun Aug 01 04:00:00 EDT 1982 · Sov. J. Quant. Electron. (Engl. Transl.); (United States)

DOI:https://doi.org/10.1070/QE1982v012n08ABEH005741· OSTI ID:6898148

Basov, N G; Bykovskii, Y A; Vinogradov, A V

A study was made of the efficiency of conversion of target-heating laser radiation into x rays emitted by a plasma in a wide range of laser radiation power densities (5 x 10/sup 11/--2 x 10/sup 14/ W/cm/sup 2/) and atomic numbers of the target material (4--92). Estimates were obtained of the exposure dose needed for x-ray photolithography of resists when such a laser-plasma source of soft x rays was used.

• Research Organization: P. N. Lebedev Physics Institute, Academy of Sciences of the USSR, Moscow
• OSTI ID: 6898148
• Journal Information: Sov. J. Quant. Electron. (Engl. Transl.); (United States), Journal Name: Sov. J. Quant. Electron. (Engl. Transl.); (United States) Vol. 12:8; ISSN SJQEA
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
700104* -- Fusion Energy-- Plasma Research-- Plasma Kinetics-Experimental-- (-1987)
DOSES
EFFICIENCY
ELECTROMAGNETIC RADIATION
IONIZING RADIATIONS
LASER RADIATION
LASER TARGETS
LASER-PRODUCED PLASMA
MASKING
PLASMA
POWER
RADIATION DOSES
RADIATIONS
TARGETS
X RADIATION