Infrared reflectance properties of surface thin films

Journal Article · Thu Oct 05 04:00:00 EDT 1989 · Journal of Physical Chemistry; (USA)

DOI:https://doi.org/10.1021/j100357a036· OSTI ID:6884824

Yen, Yu-Sze ^[1]; Wong, J S ^[2]

---

1. Almaden Research Center, San Jose, CA (USA)
2. IBM General Products Division, San Jose, CA (USA)

Analytic expressions for the reflectance of an isotropic thin film with flat, parallel sides on a semi-infinite substrate are developed for the tin film limit. Proper expressions are given for the limiting cases of ideal dielectric substrates (k{sub d} = O) and metallic substrates (k{sub b} >> 1). The interesting case of the intermediate substrate (k{sub b} {approx} 1) is treated for the first time. The reflectance spectra in the limiting cases are written as linear combinations of the transverse optical and longitudinal optical energy-loss functions of the thin film. Spectra of films on an intermediate substrate with constant extinction coefficient will have distorted line shapes as a result of contributions from the real part of the film's dielectric function. For a substrate with an absorption resonance, additional bands from the substrate will appear, one of which shifts in frequency with incident angle, even in a spectrum normalized to the reflectance of the bare substrate.

• OSTI ID: 6884824
• Journal Information: Journal of Physical Chemistry; (USA), Journal Name: Journal of Physical Chemistry; (USA) Vol. 93:20; ISSN 0022-3654; ISSN JPCHA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360100* -- Metals & Alloys
360102 -- Metals & Alloys-- Structure & Phase Studies
CALCULATION METHODS
COATINGS
DATA ANALYSIS
DIELECTRIC PROPERTIES
ELECTRICAL PROPERTIES
ELEMENTS
FILMS
INFRARED SPECTRA
METALS
PHYSICAL PROPERTIES
REFLECTIVE COATINGS
SPECTRA
SUBSTRATES
THIN FILMS