Sol-gel coating on acoustic wave devices: Thin film characterization and chemical sensor development
We have investigated the use of porous oxide coatings, formed using sol-gel chemistry routes, as the discriminating elements of acoustic wave (AW) chemical sensors. These coatings provide several unique advantages: durability, high adsorption capacity based on large surface areas, and chemical selectivity based on both molecular size and chemical interactions. The porosity of these coatings is determined by performing nitrogen adsorption isotherms using the AW device response to mass changes to monitor the uptake of nitrogen at 77 K. These studies demonstrate how sol-gel chemistry and film-forming technique can be used to tailor the microstructure of thin coatings. The chemical sensitivity and selectivity obtained with this class of coatings will be demonstrated using several examples: hydrous titanate ion exchange coatings, zeolite/silicate microcomposite coatings, and surface-modified silicate films. 18 refs., 4 figs., 2 tabs.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (USA)
- Sponsoring Organization:
- DOE/DP
- DOE Contract Number:
- AC04-76DP00789
- OSTI ID:
- 6884008
- Report Number(s):
- SAND-89-2802C; CONF-900466--56; ON: DE90012224
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ACOUSTIC MEASUREMENTS
CHALCOGENIDES
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
INORGANIC ION EXCHANGERS
ION EXCHANGE MATERIALS
MATERIALS
MEASURING INSTRUMENTS
MICROSTRUCTURE
MINERALS
NITROGEN
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
POROSITY
PROBES
SILANES
SILICATES
SILICON COMPOUNDS
SOL-GEL PROCESS
SURFACE COATING
ZEOLITES
360201 -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ACOUSTIC MEASUREMENTS
CHALCOGENIDES
COATINGS
CRYSTAL STRUCTURE
DEPOSITION
ELEMENTS
HYDRIDES
HYDROGEN COMPOUNDS
INORGANIC ION EXCHANGERS
ION EXCHANGE MATERIALS
MATERIALS
MEASURING INSTRUMENTS
MICROSTRUCTURE
MINERALS
NITROGEN
NONMETALS
ORGANIC COMPOUNDS
ORGANIC SILICON COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
POROSITY
PROBES
SILANES
SILICATES
SILICON COMPOUNDS
SOL-GEL PROCESS
SURFACE COATING
ZEOLITES