Method for fabricating thin films of pyrolytic carbon

Patent · Thu Mar 13 00:00:00 EST 1980

OSTI ID:6876860

Brassell, G W; Lewis, J Jr; Weber, G W

The present invention relates to a method for fabricating ultrathin films of pyrolytic carbon. Pyrolytic carbon is vapor deposited onto a concave surface of a heated substrate to a total uniform thickness in the range of about 0.1 to 1.0 micrometer. The carbon film on the substrate is provided with a layer of adherent polymeric resin. The resulting composite film of pyrolytic carbon and polymeric resin is then easily separated from the substrate by shrinking the 10 polymeric resin coating with thermally induced forces.

• DOE Contract Number: W-7405-ENG-26
• Assignee: Dept. of Energy
• OSTI ID: 6876860
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
PYROLYTIC CARBON
FABRICATION
VAPOR DEPOSITED COATINGS
CARBON
COATINGS
ELEMENTS
NONMETALS
360601* - Other Materials- Preparation & Manufacture