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U.S. Department of Energy
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Ion implantation in ceramics-residual stress and properties

Conference ·
OSTI ID:6844381

The average and integrated stresses have been measured by the indentation technique for a series of sapphire crystals implanted with chromium or iron using a wide range of ion beam energy and fluences. The stress is compressive in nature and the average residual stress is in the range of 1100 MPa, i.e. about the value of the bulk rupture strength of defect-free single crystalline sapphire. Data for specimens implanted with iron indicate that a saturation value in average stress is reached at 10/sup 16/ Fe/Cm/sub 2/ (160 keV) but a saturation for Cr-implantation is not apparent. The residual compressive stress has a marked influence on the apparent fracture toughness as measured by the indentation technique and the fracture strength measured in bend tests. 23 refs., 6 figs.

Research Organization:
Oak Ridge National Lab., TN (USA)
DOE Contract Number:
AC05-84OR21400
OSTI ID:
6844381
Report Number(s):
CONF-8809115-1; ON: DE88015555
Country of Publication:
United States
Language:
English