Manufacture, structure and performance of W/B/sub 4/C multilayer x-ray mirrors

Conference · Wed Jun 01 00:00:00 EDT 1988

OSTI ID:6807527

Jankowski, A F; Makowiecki, D M

One of the most important considerations in the design and manufacture of multilayer mirrors is material compatibility. Ideally, the materials selected should not chemically react or interdiffuse thereby avoiding the formation of second phases, enhancing the smoothness of the deposited layer interface and hence enhancing the reflectivity of the optic. It is also possible to increase the reflectivity by decreasing the thickness of the more absorbing layers and increasing the thickness of the less absorbing layers, for any given periodicity. The optimum thickness of each layer, however, is rigorously related to the specific materials as well as the x-ray wavelength being used. The transparency of the spacing (low absorption) layers can thus be augmented by materials of low absorption that are thermodynamically stable and which deposit in a smooth continuous fashion. Whereas the use of boron as opposed to carbon as a spacing material provides lower absorption, it is typically inferior in providing as low as interfacial roughness in multilayer form. For example, in rhenium-tungsten/carbon multilayers, produced by evaporation, a typical roughness of <0.3 nm is obtained versus 0.7 nm for rhenium-tungsten/boron multilayers. Our initial findings with B/sub 4/C layers indicate deposits which show layer smoothness exceeding those containing carbon with the advantage of greater stability, lower absorption and therefore greater reflectivity. The manufacture, microstructure and reflectivity of W/B/sub 4/C multilayers will be the focus of this presentation. 11 refs., 7 figs., 1 tab.

• Research Organization: Lawrence Livermore National Lab., CA (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6807527
• Report Number(s): UCRL-98255; CONF-880887-25; ON: DE89001503
• Resource Relation: Conference: 32. international technical symposium on optical and opto-electronic applied sciences and engineering, San Diego, CA, USA, 14 Aug 1988; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
MIRRORS
X-RAY DIFFRACTION
X-RAY EQUIPMENT
PERFORMANCE
BORON COMPOUNDS
CARBON COMPOUNDS
DESIGN
MANUFACTURING
NUMERICAL DATA
REFLECTIVITY
TUNGSTEN
COHERENT SCATTERING
DATA
DIFFRACTION
ELEMENTS
EQUIPMENT
INFORMATION
METALS
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
SCATTERING
SURFACE PROPERTIES
TRANSITION ELEMENTS
440300* - Miscellaneous Instruments- (-1989)