Strip type radiation detector and method of making same
Patent
·
OSTI ID:6806135
An improved strip detector and a method for making such a detector are described. A high resistivity N conduction semiconductor body has electrode strips formed thereon by diffusion. The strips are formed so as to be covered by an oxide layer at the surface point of the PN junction and in which the opposite side of the semiconductor body then has a substantial amount of material etched away to form a thin semiconductor upon which strip electrodes which are perpendicular to the electrodes on the first side are then placed.
- Assignee:
- Siemens AG
- Patent Number(s):
- US 4060822
- Application Number:
- TRN: 79-002215
- OSTI ID:
- 6806135
- Resource Relation:
- Patent File Date: Filed date 24 Feb 1976
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
POSITION SENSITIVE DETECTORS
FABRICATION
SEMICONDUCTOR DETECTORS
DESIGN
ETCHING
N-TYPE CONDUCTORS
P-N JUNCTIONS
SPATIAL RESOLUTION
JUNCTIONS
MEASURING INSTRUMENTS
RADIATION DETECTORS
RESOLUTION
SEMICONDUCTOR JUNCTIONS
SEMICONDUCTOR MATERIALS
SURFACE FINISHING
440101* - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments
POSITION SENSITIVE DETECTORS
FABRICATION
SEMICONDUCTOR DETECTORS
DESIGN
ETCHING
N-TYPE CONDUCTORS
P-N JUNCTIONS
SPATIAL RESOLUTION
JUNCTIONS
MEASURING INSTRUMENTS
RADIATION DETECTORS
RESOLUTION
SEMICONDUCTOR JUNCTIONS
SEMICONDUCTOR MATERIALS
SURFACE FINISHING
440101* - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments