New scanning transmission electron microscope microanalytical system

Journal Article · Sun Feb 01 04:00:00 EST 1987 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1139655· OSTI ID:6801982

Parker, N W; Mittleman, R K; Crewe, A V

We have designed and built an improved, dedicated analytical scanning transmission electron microscope (STEM). A novel feature of this microscope is a magnetic lens above the accelerating gun, allowing the specimen probe to achieve very high current densities while retaining the high spatial resolution of the STEM. Integrated with this microscope, we have also implemented an image processing system which allows rapid analysis of the digitized microscope output signals. This processing system also allows the graphic simulation of planar materials (such as intercalated graphite) to derive diffraction pattern simulations for comparison with the experimental data. An image database system allows over 2000 images to be easily managed.

• Research Organization: The Enrico Fermi Institute, The University of Chicago, 5640 S. Ellis Avenue, Chicago, Illinois 60637
• OSTI ID: 6801982
• Journal Information: Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 58:2; ISSN RSINA
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
ALIGNMENT
APERTURES
COMPUTERIZED CONTROL SYSTEMS
COMPUTERS
CONTROL SYSTEMS
DESIGN
ELECTROMAGNETIC LENSES
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
ELECTRONIC CIRCUITS
IMAGE PROCESSING
LENSES
MICROELECTRONIC CIRCUITS
MICROPROCESSORS
MICROSCOPES
MICROSCOPY
OPENINGS
OPERATION
PERFORMANCE
PROCESSING
RESOLUTION
SAMPLE HOLDERS
SCANNING ELECTRON MICROSCOPY
SIMULATION
TRANSMISSION ELECTRON MICROSCOPY