Low-temperature deposition of ZrC thin films from a single source precursor

Conference · Wed Jan 01 04:00:00 UTC 1992

OSTI ID:6798352

Smith, D C; Healy, M D; Springer, R W ^[1]; Rubiano, R R ^[2]

---

1. Los Alamos National Lab., NM (United States)
2. Massachusetts Inst. of Tech., Cambridge, MA (United States). Dept. of Nuclear Engineering

Stable zirconium carbide thin films have been deposited from a single source organometallic precursor, tetraneopentyl zirconium, at substrate temperatures above 500C. Materials deposited above this temperature are crystalline by X-ray diffraction. A metal to carbon ratio of 1:2 is observed by Auger electron spectroscopy depth profiling. X-ray photoelectron spectroscopy indicates the zirconium is single phase. The observed spectra correspond well to spectra for zirconium carbide standards. Carbon XPS reveals carbidic and graphitic or hydrocarbon species with a third unknown carbon species. Elastic recoil detection finds a large, up to 16%, hydrogen content in the thin film.

• Research Organization: Los Alamos National Lab., NM (United States)
• Sponsoring Organization: DOE; USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-36
• OSTI ID: 6798352
• Report Number(s): LA-UR-93-351; CONF-921101--83; ON: DE93007333
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
AUGER ELECTRON SPECTROSCOPY
CARBIDES
CARBON COMPOUNDS
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
COHERENT SCATTERING
DEPOSITION
DIFFRACTION
ELECTRON SPECTROSCOPY
FILMS
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
PHOTOELECTRON SPECTROSCOPY
SCATTERING
SPECTROSCOPY
SURFACE COATING
THIN FILMS
TITANIUM CARBIDES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
X-RAY DIFFRACTION
ZIRCONIUM CARBIDES
ZIRCONIUM COMPOUNDS