Substrate composition effects on the interfacial fracture of tantalum nitride films

Journal Article · Tue Jun 01 04:00:00 EDT 1999 · Journal of Materials Research

DOI:https://doi.org/10.1557/JMR.1999.0307· OSTI ID:678835

Moody, N R; Medlin, D L ^[1]; Gerberich, W.W. Talin, A. ^[2]

---

1. Sandia National Laboratories, Livermore, California 94551-0969 (United States)
2. University of Minnesota, Minneapolis, Minnesota 55455 (United States); Motorola, Tempe, Arizona (United States)

In this study we combined nanoscratch testing with a multilayer sapphire and aluminum nitride single-substrate system to determine the effects of interface composition and structure on susceptibility to fracture of hard, thin tantalum nitride films. Nanoindentation tests showed that the elastic moduli of the tantalum nitride and aluminum nitride films, as well as the sapphire substrate, were essentially equal at 400 GPa. On both portions of the substrate, these tests also showed that near surface hardness was near 35 GPa. Nanoscratch tests triggered long blisters and circular spalls on both the sapphire and aluminum nitride portions of the substrate. The blisters showed that the tantalum nitride film was subjected to a compressive residual stress of {minus}6.7 GPa. The spalls showed that failure occurred along the tantalum nitride film-substrate interface regardless of substrate composition. Most importantly, the blisters and spalls showed that the mode I component of the fracture energies were essentially equal on both substrate materials at a value near 3.1 J/m{sup 2}. These energies are on the order of the energies for metallic bonding. {copyright} {ital 1999 Materials Research Society.}

• Research Organization: Sandia National Laboratory
• DOE Contract Number: AC04-94AL85000; FG02-96ER45574
• OSTI ID: 678835
• Journal Information: Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 6 Vol. 14; ISSN JMREEE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM COMPOUNDS
ALUMINIUM NITRIDES
ELASTICITY
FRACTURE PROPERTIES
HARDNESS
INTERFACES
MECHANICAL TESTS
NITROGEN COMPOUNDS
PROTECTIVE COATINGS
SAPPHIRE
SUBSTRATES
TANTALUM COMPOUNDS
TANTALUM NITRIDES
THIN FILMS