Soft x-ray emissions by high-current vacuum discharges

Journal Article · Wed Aug 01 00:00:00 EDT 1990 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA)

DOI:https://doi.org/10.1109/27.57523· OSTI ID:6781010

Arita, H; Suzuki, K; Kurosawa, Y; Hirasawa, K ^[1]

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1. Hitachi Research Lab., Hitachi Ltd., 4026 Kuji-cho, Hitachi-shi, Ibaraki-ken 319-12 (JP)

Soft X-ray emissions by Z-pinch discharge between vacuum spark electrodes were examined. Mainly aluminum and molybdenum were utilized to generate soft X rays, and emissions resulted for pulse currents of about 150 kA. These emissions increased as the discharge current increased. A large X-ray intensity was obtained when using a spherical anode and a conical cathode. A stable spot plasma was produced for an electrode separation distance of 2 mm. For molybdenum, the X-ray emission of the 0.52-nm line and continuous X rays of 0.65-1.2 nm were observed. The X-ray continuum was believed to be due to recombination. For aluminum alloy containing magnesium, the 0.62-, 0.66-, 0.72-, and 0.92-nm lines were observed. These experimental results indicate that vacuum spark is a potential exposure source for X-ray lithography.

• OSTI ID: 6781010
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA), Journal Name: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (USA) Vol. 18:4; ISSN ITPSB; ISSN 0093-3813
• Country of Publication: United States
• Language: English

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