Channeling transmission of protons through thin silicon membranes

Journal Article · Thu Jan 01 04:00:00 EST 1987 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.583871· OSTI ID:6768335

Parma, Jr, E J; Hart, R R; Bartelt, J L

The emergent angular and energy distributions of 80--200 keV protons transmitted through thin (<1 ..mu..m) single-crystal silicon membranes were measured using a scanning surface barrier detector which had an energy resolution of 7 keV and an acceptance angle of less than 0.1/sup 0/. Various crystal orientations, thicknesses, and membrane processing methods were examined to determine the appropriate parameters for use in masked ion beam lithography. The crystal alignment, surface disorder, and overall channeling quality of the crystal membranes were determined using proton backscattering. Membrane thickness measurements were made by determining the average energy loss of protons transmitted in a random equivalent direction and using available stopping power data. For a typical <100> oriented silicon membrane of 0.6 ..mu..m thickness, the half-width angle of the near Gaussian emergent particle distribution was 0.43/sup 0/ for an incident proton energy of 200 keV. The average energy loss of these particles was 10% less than for protons transmitted in random equivalent directions. Half-width angle measurements of the emergent distributions for the high-, intermediate-, and low-energy-loss components, as well as for the neutral component of the transmitted beam, are presented as functions of incident proton energy and film thickness for the major crystalline axes.

• Research Organization: Department of Nuclear Engineering, Texas AandM University, College Station, Texas 77843
• OSTI ID: 6768335
• Journal Information: J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 5:1; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360605 -- Materials-- Radiation Effects
654001* -- Radiation &amp; Shielding Physics-- Radiation Physics
Shielding Calculations &amp; Experiments
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
BACKSCATTERING
BARYONS
BEAMS
CHANNELING
CHARGED-PARTICLE TRANSPORT
DIMENSIONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY LOSSES
ENERGY RANGE
FERMIONS
HADRONS
ION BEAMS
KEV RANGE
LOSSES
MASKING
MEMBRANES
NUCLEON BEAMS
NUCLEONS
PARTICLE BEAMS
PROTON BEAMS
PROTON CHANNELING
PROTONS
RADIATION TRANSPORT
SCATTERING
SEMIMETALS
SILICON
STOPPING POWER
THICKNESS