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Title: Normal incidence x-ray mirror for chemical microanalysis

Patent ·
OSTI ID:6761509

An x-ray mirror for both electron column instruments and micro x-ray fluorescence instruments for making chemical, microanalysis comprises a non-planar mirror having, for example, a spherical reflecting surface for x-rays comprised of a predetermined number of alternating layers of high atomic number material and low atomic number material contiguously formed on a substrate and whose layers have a thickness which is a multiple of the wavelength being reflected. For electron column instruments, the wavelengths of interest lie above 1.5nm, while for x-ray fluorescence instruments, the range of interest is below 0.2nm. 4 figs.

Research Organization:
Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
DOE Contract Number:
AC04-76DP00789
Assignee:
SNL; ERA-14-001599; EDB-88-186307
Patent Number(s):
PATENTS-US-A6081964
OSTI ID:
6761509
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English