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Title: Transverse-structure electrostatic charged particle beam lens

Abstract

Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility. 7 figs.

Inventors:
Publication Date:
Research Org.:
University of California
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
675862
Patent Number(s):
US 5,821,543/A/
Application Number:
PAN: 8-906,303; TRN: 99:001154
Assignee:
Univ. of California, Oakland, CA (United States)
DOE Contract Number:  
W-7405-ENG-48
Resource Type:
Patent
Resource Relation:
Other Information: PBD: 13 Oct 1998
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; ELECTROSTATIC LENSES; PARTICLE BEAMS; DESIGN; GEOMETRICAL ABERRATIONS; BEAM OPTICS

Citation Formats

Moran, M J. Transverse-structure electrostatic charged particle beam lens. United States: N. p., 1998. Web.
Moran, M J. Transverse-structure electrostatic charged particle beam lens. United States.
Moran, M J. Tue . "Transverse-structure electrostatic charged particle beam lens". United States.
@article{osti_675862,
title = {Transverse-structure electrostatic charged particle beam lens},
author = {Moran, M J},
abstractNote = {Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility. 7 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {1998},
month = {10}
}