A study of electron penetration in solids using a direct Monte Carlo approach

Journal Article · Sat Nov 01 04:00:00 EST 1980 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.327515· OSTI ID:6756971

Adesida, I; Shimizu, R; Everhart, T E

Fundamental characteristics of electron penetration in solids, such as energy and angular distributions of transmitted electrons, have been theoretically calculated using a Monte Carlo approach. The essential features of the Monte Carlo approach are the inclusion of the random nature of inelastic scattering events, and also the extension of Gryzinski's semiempirical expression for core electron excitation to valence electron excitation through the use of an appropriate mean binding energy. A detailed comparison of the theoretical results for aluminum and polymethylmethacrylate (PMMA) with experimental results show that the direct Monte Carlo approach describes electron scattering events in solids very well. It is also shown that this approach describes the energy distribution of transmitted electrons through thin films of aluminum and PMMA more realistically than the Monte Carlo approaches utilizing Bethe's stopping power equation.

• Research Organization: Department of Electrical Engineering and the Electronics Research Laboratory, University of California, Berkeley, California 94720
• OSTI ID: 6756971
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 51:11; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM
ANGULAR DISTRIBUTION
BINDING ENERGY
CARBOXYLIC ACID SALTS
COLLISIONS
COMPARATIVE EVALUATIONS
DISTRIBUTION
ELECTRON COLLISIONS
ELEMENTS
ENERGY
ENERGY SPECTRA
ENERGY-LEVEL TRANSITIONS
EXCITATION
MATHEMATICAL MODELS
METALS
METHACRYLATES
MONTE CARLO METHOD
ORGANIC COMPOUNDS
PENETRATION DEPTH
SCATTERING
SOLIDS
SPECTRA
VALENCE