Electron microscopy of vapor phase deposited diamond

Journal Article · Sun Apr 01 04:00:00 EDT 1990 · Journal of Materials Research; (USA)

DOI:https://doi.org/10.1557/JMR.1990.0801· OSTI ID:6753285

Williams, B E; Kong, H S; Glass, J T ^[1]

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1. Department of Materials Science and Engineering, North Carolina State University, Raleigh, NC (USA)

Thin carbon films grown from a low pressure methane-hydrogen gas mixture by microwave plasma enhanced CVD have been examined by electron microscopy. Previously reported transmission electron microscopy (TEM) of the diamond films{sup 1} has shown that the majority of diamond crystals have a very high defect density comprised of {l brace}111{r brace} twins, {l brace}111{r brace} stacking faults, and dislocations. In this study, high resolution electron microscopy (HREM) has been utilized to lattice image individual defects in these polycrystalline diamond films. Interpretation of the images from these defects is not trivial and reported image simulations have been utilized to understand further these defects. Fivefold multiply twinned particles have also been examined and it was found that the 7.5{degree} misfit present in such particles has been accommodated at the twin boundaries rather than by elastic deformation. This creates a twin boundary coincident with a low angle grain boundary which has been termed a tilted twin boundary.'' The density of defects in these particles is generally high; however, a dramatic reduction in the defect density near the twin boundaries was observed. This defect reduction is significant because if its origin can be determined, this information may be useful in producing higher quality diamond films.

• DOE Contract Number: AC05-84OR21400; AC05-76OR00033
• OSTI ID: 6753285
• Journal Information: Journal of Materials Research; (USA), Journal Name: Journal of Materials Research; (USA) Vol. 5:4; ISSN JMREE; ISSN 0884-2914
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360602* -- Other Materials-- Structure & Phase Studies
ALKANES
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
CRYSTALS
DEPOSITION
DIAMONDS
ELASTICITY
ELECTROMAGNETIC RADIATION
ELECTRON MICROSCOPY
ELEMENTAL MINERALS
ELEMENTS
FILMS
HYDROCARBONS
HYDROGEN
IMAGES
MECHANICAL PROPERTIES
METHANE
MICROSCOPY
MICROWAVE RADIATION
MINERALS
MORPHOLOGY
NONMETALS
ORGANIC COMPOUNDS
PLASMA
POLYCRYSTALS
RADIATIONS
RESOLUTION
STACKING FAULTS
SURFACE COATING
TENSILE PROPERTIES
THIN FILMS
TWINNING