Combined microstructure x-ray optics: Multilayer diffraction gratings

Conference · Sun May 01 04:00:00 EDT 1988

OSTI ID:6741739

Barbee, Jr, T W

Multilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements. 9 refs., 5 figs.

• Research Organization: Lawrence Livermore National Lab., CA (USA)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 6741739
• Report Number(s): UCRL-97098; CONF-871124-105; ON: DE89001501
• Country of Publication: United States
• Language: English

Related Subjects

440300* -- Miscellaneous Instruments-- (-1989)
47 OTHER INSTRUMENTATION
BRAGG REFLECTION
CARBON
COHERENT SCATTERING
CRYSTAL STRUCTURE
DIFFRACTION
EFFICIENCY
ELEMENTS
EQUATIONS
GRATINGS
LAYERS
METALS
MICROSTRUCTURE
MOLYBDENUM
MONOCHROMATORS
NONMETALS
OPTICAL DISPERSION
REFLECTION
SCATTERING
SEMIMETALS
SILICON
TRANSITION ELEMENTS
TUNGSTEN
X-RAY DIFFRACTION