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Orientation selection and microstructural evolution of epitaxial platinum films on (001) magnesium oxide

Conference ·
OSTI ID:6722243

Thin platinum films were deposited at several different deposition rates and with varying thickness on (001)-cut MgO single crystal substrates by electron beam evaporation. A mixture of two epitaxial Pt orientations were detected in the films by X-ray diffraction and planar ion channeling experiments: (001)[100]Pt // (001)[100]MgO (the [open quotes]cube-on-cube[close quotes] orientation) and (111)[110]Pt // (001)[110]MgO. The effect of deposition rate on film orientation indicated the (111)Pt orientation was preferred under conditions of high driving force for nucleation. The volume fraction of the films occupied by the (111) orientation increased with nominal film thickness, at a constant substrate temperature and deposition rate. This result indicates crystallites having the (111)Pt orientation grew more quickly following nucleation than the (001). The mosaic spread of the Pt orientation decreased markedly as the nominal film thickness increased from [approximately] 1.5 nm (isolated islands) to 20 nm (continuous film).

Research Organization:
Los Alamos National Lab., NM (United States)
Sponsoring Organization:
DOE; USDOE, Washington, DC (United States)
DOE Contract Number:
W-7405-ENG-36
OSTI ID:
6722243
Report Number(s):
LA-UR-94-4052; CONF-941144--3; ON: DE95003680
Country of Publication:
United States
Language:
English