Gas dynamics in residual gas analyzer calibration

Journal Article · Thu Jan 01 00:00:00 EST 1987 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.574125· OSTI ID:6720049

Santeler, D J

Residual gas analyzers are used for measuring partial flow rates as well as for measuring partial pressures. The required calibration may also be obtained with either known flow rates or known pressures. The calibration and application procedures are straightforward when both are of the same type; however, substantial errors may occur if the two types are mixed. This report develops the basic equations required to convert between partial pressure calibrations and partial flow rate calibrations. It also discusses the question of fractionating and nonfractionating gas flow in various gas inlet and pumping systems.

• Research Organization: Process Applications, Inc., Oak Ridge, Tennessee 37830
• OSTI ID: 6720049
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 5:1
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
47 OTHER INSTRUMENTATION
GAS ANALYSIS
MEASURING INSTRUMENTS
GAS FLOW
CALIBRATION
FLOW RATE
VAPOR PRESSURE
FLUID FLOW
PHYSICAL PROPERTIES
THERMODYNAMIC PROPERTIES
420200* - Engineering- Facilities
Equipment
& Techniques
440300 - Miscellaneous Instruments- (-1989)