Ion source with plasma cathode

Journal Article · Thu Jan 01 00:00:00 EST 1987 · Rev. Sci. Instrum.; (United States)

DOI:https://doi.org/10.1063/1.1139559· OSTI ID:6699552

Yabe, E

A long lifetime ion source with plasma cathode has been developed for use in ion implantation. In this ion source, a plasma of a nonreactive working gas serves as a cathode in place of a thermionic tungsten filament used in the Freeman ion source. In an applied magnetic field, the plasma is convergent, i.e., filamentlike; in zero magnetic field, it turns divergent and spraylike. In the latter case, the plasma exhibits a remarkable ability when the working gas has an ionization potential larger than the feed gas. By any combination of a working gas of either argon or neon and a feed gas of AsF/sub 5/ or PF/sub 5/, the lifetime of this ion source was found to be more than 90 h with an extraction voltage of 40 kV and the corresponding ion current density 20 mA/cm/sup 2/. Mass spectrometry results show that this ion source has an ability of generating a considerable amount of As/sup +/ and P/sup +/ ions from AsF/sub 5/ and PF/sub 5/, and hence will be useful for realizing a fully cryopumped ion implanter system. This ion source is also eminently suitable for use in oxygen ion production.

• Research Organization: Institute of Research and Development, Tokai University, 1117 Kitakaname, Hiratsuka, Kanagawa 259-12, Japan
• OSTI ID: 6699552
• Journal Information: Rev. Sci. Instrum.; (United States), Vol. 58:1
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ION IMPLANTATION
ION SOURCES
DESIGN
OPERATION
ARSENIC IONS
CATHODES
FILAMENTS
IONIZATION
MAGNETIC FIELDS
OXYGEN IONS
PHOSPHORUS IONS
PLASMA
TUNGSTEN
CHARGED PARTICLES
ELECTRODES
ELEMENTS
IONS
METALS
TRANSITION ELEMENTS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions