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Title: Analysis of time-of-flight spectra

Journal Article · · Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA)
DOI:https://doi.org/10.1116/1.576597· OSTI ID:6697463
 [1];  [2];  [1];  [3];  [1]
  1. Interdisciplinary Research Centre for Semiconductor Materials, The Blackett Laboratory, Imperial College, London, SW7 2BZ (England)
  2. Philips Research Laboratories, Redhill, Surrey, RH1 5HA (England)
  3. VG Quadrupoles, Aston Way, Middlewich, Cheshire, CW10 0HS (England)

A simplified method of data analysis for time of flight measurements of the velocity of molecular beams sources is described. This method does not require the complex data fitting previously used in such studies. The method is applied to the study of Pb molecular beams from a true Knudsen source and has been used to show that a VG Quadrupoles SXP300H mass spectrometer, when fitted with an open cross-beam ionizer, acts as an ideal density detector over a wide range of operating conditions.

OSTI ID:
6697463
Journal Information:
Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (USA), Vol. 8:4; ISSN 0734-2101
Country of Publication:
United States
Language:
English