Ion beam assisted deposition of tribological coatings
The ion beam assisted deposition (IBAD) process provides a means of depositing adherent coatings at lower process temperatures than can be achieved by chemical vapor deposition (CVD). The present report reviews NRL experience in deposition TiN and Cr[sub 2]O[sub 3] coatings and the evaluation of selected surface mechanical properties. The microstructure and properties of the TiN coating were found to strongly influenced by processing conditions. Among the significant findings were the observations that the ion beam activates a process for conversion of adsorbed nitrogen to chemically bound nitrogen, That IBAD films produced at low ion to atom arrival rate ratios are soft and ductile, while those produced at arrival rate ratios of 0.3 to 0.4 are hard but still ductile, that all IBAD films are exceptionally adherent to steel substrates and that the soft films are very fine grained (<10 nm) and have a network of pores at the grain boundaries. Experiments to optimize these films for advanced automotive applications are outlined.
- Research Organization:
- Naval Research Lab., Washington, DC (United States)
- Sponsoring Organization:
- DOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- AI02-88CE90024
- OSTI ID:
- 6671695
- Report Number(s):
- DOE/CE/90024-1; ON: DE93011520
- Country of Publication:
- United States
- Language:
- English
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Ion beam assisted deposition of tribological coatings
Ion beam assisted deposition of tribological coatings
Related Subjects
070205 -- Radiation Sources-- Industrial Applications
Radiation Processing-- (1987-)
36 MATERIALS SCIENCE
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ADHESION
ARGON IONS
BEAMS
CHALCOGENIDES
CHARGED PARTICLES
CHROMIUM COMPOUNDS
CHROMIUM OXIDES
DEPOSITION
FILMS
FRICTION
HARDNESS
ION BEAMS
IONS
KNOOP HARDNESS
MECHANICAL PROPERTIES
MICROHARDNESS
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
SLIDING FRICTION
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS