Applications of microfabrication technology to x-ray laser cavities

Journal Article · Tue Nov 01 04:00:00 EST 1988 · J. Vac. Sci. Technol., B; (United States)

DOI:https://doi.org/10.1116/1.584105· OSTI ID:6666706

Hawryluk, A M; Ceglio, N M; Stearns, D G

We have fabricated new, efficient x-ray optical components (x-ray mirrors, beamsplitters, and highly dispersive multilayer mirrors) and have used them to build an x-ray laser cavity. With our laser cavity, we have demonstrated multipass amplification of soft x rays with significant enhancement (>20 x ) of the x-ray laser emission. This is an important first step in the ultimate conversion of x-ray amplifier media into true x-ray lasers with optimized coherence and divergence properties. We used advanced microfabrication techniques to fabricate the key laser cavity components which require precise layering of alternating materials, thin-film membrane technology, and precise patterning. The x-ray laser requirements, fabrication details, and characterization results for these cavity components are discussed.

• Research Organization: Lawrence Livermore National Laboratory, Livermore, California 94550
• OSTI ID: 6666706
• Journal Information: J. Vac. Sci. Technol., B; (United States), Journal Name: J. Vac. Sci. Technol., B; (United States) Vol. 6:6; ISSN JVTBD
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
AMPLIFIERS
ELECTROMAGNETIC RADIATION
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
IONIZING RADIATIONS
LASER CAVITIES
LASERS
RADIATIONS
SOFT X RADIATION
X RADIATION
X-RAY LASERS