Mechanical properties of Cu/Ta multilayers prepared by magnetron sputtering
The microstructure and mechanical properties of sputtered Cu/Ta multilayers were studied. X- ray diffraction and transmission electron microscopy characterization indicate that both the Ta and Cu in the 2 nm period multilayer are predominantly amorphous, while in longer period samples, the layers are crystalline, with the metastable tetragonal {beta}-Ta observed. No observable microstructure changes upon annealing at 300{degrees}C were found. An average Vickers micro- hardness value of about 5.5 GPa was measured, which increases about 5% upon annealing at 300{degrees}C. Residual stress in the multilayers and its dependence on thermal annealing are reported. The relationships between microstructure and mechanical properties in the multilayers are discussed.
- Research Organization:
- Lawrence Livermore National Lab. (LLNL), Livermore, CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 665625
- Report Number(s):
- UCRL-JC-130782; CONF-980405-; ON: DE98057690; BR: YN0100000
- Resource Relation:
- Conference: Spring meeting of the Materials Research Society, San Francisco, CA (United States), 13-17 Apr 1998; Other Information: PBD: 1 Apr 1998
- Country of Publication:
- United States
- Language:
- English
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