Semiconductor-laser-diode arrays by MOCVD (metalorganic chemical vapor deposition). Final report, 1 September 1984-31 August 1987
The purpose of this program is to develop the metalorganic chemical vapor deposition (MOCVD) epitaxial growth process for semiconductor heterostructure laser-diode arrays. These laser diode arrays are intended to be used as an optical pump for solid-state yttrium aluminum garnet (YAG) lasers. In particular, linear uniform arrays having high output power, high efficiency, low laser threshold current density and precisely controlled emission wavelength are required. There are three technical problems associated with this task. The first problem is development of individual laser-diode device structures that satisfy the requirements for efficiency, threshold, and wavelength control and are suitable for incorporation into laser arrays. There are a number of possible structures varying in complexity from conventional five-layer double heterostructures having alloy AlGaAs active regions to very-sophisticated quantum-well heterostructures (QWH). The second problem is an analytical study of the waveguide properties of multi-element laser arrays. Simple arrays of conventional double heterostructure laser diodes were studied, but extension of this work to other laser-diode geometries is non-trivial. Preliminary and optimum geometries for the individual structures and the photomasks used for device processing require some modeling of the optical properties of these arrays. The third problem, and the major point of this entire program, is experimental development of suitably designed individual laser-diode structures in a well-modeled multi-element array.
- Research Organization:
- Illinois Univ., Urbana (USA). Dept. of Electrical and Computer Engineering
- OSTI ID:
- 6614744
- Report Number(s):
- AD-A-198855/9/XAB
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
420300* -- Engineering-- Lasers-- (-1989)
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DOCUMENT TYPES
EFFICIENCY
EMISSION
LASERS
OPTICAL PROPERTIES
OPTICAL PUMPING
OPTIMIZATION
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
PHYSICAL PROPERTIES
PROGRESS REPORT
PUMPING
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMICONDUCTOR LASERS
SURFACE COATING
WAVEGUIDES