Characterization of sputter-deposited LiMn[sub 2]O[sub 4] thin films for rechargeable microbatteries

Journal Article · Thu Dec 01 04:00:00 EST 1994 · Journal of the Electrochemical Society; (United States)

DOI:https://doi.org/10.1149/1.2059329· OSTI ID:6613837

Hwang, K H; Lee, S H; Joo, D K ^[1]

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1. Seoul National Univ. (Korea, Republic of). Dept. of Metallurgical Engineering

Thin films of LiMn[sub 2]O[sub 4] spinel were fabricated by RF magnetron sputtering. The as-deposited films were amorphous but could be crystallized into a spinel structure by rapid thermal annealing in an oxygen atmosphere. The electrochemical performance of 2000 [angstrom] thick LiMn[sub 2]O[sub 4] thin-film cathodes were tested in a LiMn[sub 2]O[sub 4]/1M LiClO[sub 4] in PC + DME/Li cell. LiMn[sub 2]O[sub 4] spinel films prepared at 750 C showed good intercalation kinetics and very promising cycling behavior. Room temperature cycling of these films had capacities of about 50 [mu]Ah/cm[sup 2]-[mu]m at 200 [mu]A/cm[sup 2] and maintained more than 98% of their original capacity after more than 1000 cycles.

• OSTI ID: 6613837
• Journal Information: Journal of the Electrochemical Society; (United States), Journal Name: Journal of the Electrochemical Society; (United States) Vol. 141:12; ISSN JESOAN; ISSN 0013-4651
• Country of Publication: United States
• Language: English

Related Subjects

25 ENERGY STORAGE
250903* -- Energy Storage-- Batteries-- Materials
Components
& Auxiliaries
36 MATERIALS SCIENCE
360200 -- Ceramics
Cermets
& Refractories
ALKALI METAL COMPOUNDS
BATTERY CHARGING
CATHODES
CHALCOGENIDES
COATINGS
ELECTRIC BATTERIES
ELECTRICAL PROPERTIES
ELECTROCHEMICAL CELLS
ELECTRODES
LITHIUM COMPOUNDS
LITHIUM OXIDES
MANGANESE COMPOUNDS
MANGANESE OXIDES
MORPHOLOGY
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SPUTTERING
TRANSITION ELEMENT COMPOUNDS
VAPOR DEPOSITED COATINGS