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U.S. Department of Energy
Office of Scientific and Technical Information

Method and apparatus for the production of cluster ions

Patent ·
OSTI ID:6576403
A method and apparatus for the production of cluster ions, and preferably hydrogen cluster ions. A gas, preferably comprising a carrier gas and a substrate gas, is expanded through a supersonic nozzle into a region maintained at a low pressure. Means are provided for the generation of a plasma in the gas just as it enters the nozzle. For the generation of hydrogen cluster ions the gas may be cooled. In one embodiment of the invention means for collimating the beam cluster ions formed may be provided.
DOE Contract Number:
AC02-76CH00016
Assignee:
Dept. of Energy
Patent Number(s):
None
OSTI ID:
6576403
Country of Publication:
United States
Language:
English