Characterization techniques for surface-micromachined devices
Conference
·
OSTI ID:656748
Using a microengine as the primary test vehicle, the authors have examined several aspects of characterization. Parametric measurements provide fabrication process information. Drive signal optimization is necessary for increased microengine performance. Finally, electrical characterization of resonant frequency and quality factor can be more accurate than visual techniques.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 656748
- Report Number(s):
- SAND--98-1782C; CONF-980918--; ON: DE98007267; BR: DP0102022
- Country of Publication:
- United States
- Language:
- English
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