Hardness of amorphous hard carbon films determined by the ultra-low load microindentation technique

Conference · Sun Jan 01 04:00:00 EST 1989

OSTI ID:6550884

Joslin, D L; O'Hern, M E; McHargue, C J; Clausing, R E; Oliver, W C

Amorphous carbon films variously designated as i-C, ..cap alpha..-C:H, diamond-like or hard carbon films, have interesting optical and mechanical properties and are candidates for wear and corrosion protection in a wide range of applications. Because the depth of penetration by the indenter in normal hardness tests often approaches or exceeds the thickness of the diamond-like coating film, hardness data may reflect large substrate effects. This paper gives the results of ultra-low load microindentation hardness measurements which allow data to be obtained for indentation depths as small as 20 nm. The data also yield information on the elastic modulus of the coatings. Films were obtained from a number of sources and had been prepared by several techniques. The hardness values are in the range of 7 to 15 GPa and depend on the exact preparation parameters. The hardness data will be compared to those obtained by the Knoop technique. 6 refs., 10 figs.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 6550884
• Report Number(s): CONF-890142-2; ON: DE89006129
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ALUMINIUM COMPOUNDS
ALUMINIUM OXIDES
AMORPHOUS STATE
CARBIDES
CARBON
CARBON COMPOUNDS
CHALCOGENIDES
CORUNDUM
DATA
ELASTICITY
ELEMENTS
EXPERIMENTAL DATA
FILMS
HARDNESS
INFORMATION
KNOOP HARDNESS
MECHANICAL PROPERTIES
MICROHARDNESS
MINERALS
NONMETALS
NUMERICAL DATA
OXIDE MINERALS
OXIDES
OXYGEN COMPOUNDS
SAPPHIRE
SILICON CARBIDES
SILICON COMPOUNDS
SUBSTRATES
TENSILE PROPERTIES
THIN FILMS