Performance of a novel injection-locked excimer laser

Journal Article · Mon Oct 01 04:00:00 EDT 1984 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.334219· OSTI ID:6547095

McKee, T J; Hastie, S D; Weeks, R W

Improvements in temporal and spatial coherence of XeCl and KrF excimer laser emission using pulsed injection locking are described for a novel discharge circuit contained within a single laser. Using standard techniques, spectral linewidths of 0.005 nm with divergence of 0.15 mrad are observed, providing an improvement of approximately 3 x 10/sup 4/ in brightness over a standard excimer laser of similar active volume.

• Research Organization: Lumonics Incorporated, Kanata, Ontario, Canada K2K 1Y3
• OSTI ID: 6547095
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 56:7; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
BRIGHTNESS
CHLORIDES
CHLORINE COMPOUNDS
COHERENT RADIATION
DESIGN
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELECTRONIC CIRCUITS
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASER RADIATION
LASERS
MODE LOCKING
OPTICAL PROPERTIES
PERFORMANCE
PHYSICAL PROPERTIES
RADIATIONS
RARE GAS COMPOUNDS
XENON CHLORIDES
XENON COMPOUNDS