Integrated micro-electro-mechanical sensor development for inertial applications
Conference
·
OSTI ID:654099
- and others
Electronic sensing circuitry and micro electro mechanical sense elements can be integrated to produce inertial instruments for applications unheard of a few years ago. This paper will describe the Sandia M3EMS fabrication process, inertial instruments that have been fabricated, and the results of initial characterization tests of micro-machined accelerometers.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 654099
- Report Number(s):
- SAND--98-0574C; CONF-980420--; ON: DE98004105; BR: 4050GB010
- Country of Publication:
- United States
- Language:
- English
Similar Records
Micro-system inertial sensing technology overview.
Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)
MEMS inertial sensors with integral rotation means.
Technical Report
·
Sat Jan 31 23:00:00 EST 2009
·
OSTI ID:983678
Infrastructure, Technology and Applications of Micro-Electro-Mechanical Systems (MEMS)
Conference
·
Fri Jul 09 00:00:00 EDT 1999
·
OSTI ID:8955
MEMS inertial sensors with integral rotation means.
Technical Report
·
Mon Sep 01 00:00:00 EDT 2003
·
OSTI ID:917477