Monte Carlo calculation of electron scattering from surface films

Journal Article · Fri Nov 15 04:00:00 EST 1985 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.335629· OSTI ID:6521962

Jr, Williamson W; Antolak, A J

The electron backscattering coefficient and reflected energy for surface films on bulk substrates have been computed using the photon-electron Monte Carlo transport code sandyl. The calculations were done for the film/substrate configurations Al/Pt, Ag/Pt, Ag/Al, and Au/Al with incident electron beam energies of 20, 40, 60, and 100 keV at different angles of incidence and various film thicknesses. The backscattering results are compared with available experimental data taken at normal incidence.

• Research Organization: University of Toledo, Department of Physics and Astronomy, Toledo, Ohio 43606
• OSTI ID: 6521962
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 58:10; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ALUMINIUM
BACKSCATTERING
BEAMS
COLLISIONS
DATA
DIMENSIONS
ELECTRON BEAMS
ELECTRON COLLISIONS
ELECTRONS
ELEMENTARY PARTICLES
ELEMENTS
ENERGY RANGE
ENERGY SPECTRA
FERMIONS
GOLD
INCIDENCE ANGLE
INFORMATION
KEV RANGE
KEV RANGE 10-100
LEPTON BEAMS
LEPTONS
METALS
MONTE CARLO METHOD
NUMERICAL DATA
PARTICLE BEAMS
PLATINUM
PLATINUM METALS
SCATTERING
SILVER
SPECTRA
THEORETICAL DATA
THICKNESS
TRANSITION ELEMENTS