KrF laser-induced ablation and patterning of Y--Ba--Cu--O films

Journal Article · Sat Sep 01 04:00:00 EDT 1990 · Journal of Applied Physics; (USA)

DOI:https://doi.org/10.1063/1.346519· OSTI ID:6521643

Heitz, J; Wang, X Z; Schwab, P; Baeuerle, D ^[1]; Schultz, L ^[2]

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1. Angewandte Physik, Johannes-Kepler-Universitaet Linz, A-4040 Linz (Austria)
2. Siemens AG, Research Laboratories, D-8520 Erlangen (Germany)

The ablation and patterning of Y--Ba--Cu--O films on (100) SrTiO{sub 3} and (100) MgO substrates by KrF excimer-laser light projection was investigated. Three different regimes of laser-material interactions were observed. Transition temperatures and critical current densities in laser-fabricated strip lines were investigated.

• OSTI ID: 6521643
• Journal Information: Journal of Applied Physics; (USA), Journal Name: Journal of Applied Physics; (USA) Vol. 68:5; ISSN 0021-8979; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204* -- Ceramics
Cermets
& Refractories-- Physical Properties
ABLATION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
CRITICAL CURRENT
CURRENTS
ELECTRIC CURRENTS
ELECTROMAGNETIC RADIATION
ETCHING
EXCIMER LASERS
FILMS
GAS LASERS
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
LASERS
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
STRONTIUM COMPOUNDS
SUBSTRATES
SUPERCONDUCTORS
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TITANATES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
YTTRIUM COMPOUNDS
YTTRIUM OXIDES