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Detailed characterization of TiC and TiN coatings prepared by the activated reactive evaporation process

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.574730· OSTI ID:6511981
The objective is to investigate the relationship between the composition, microstructure, and microhardness of TiC and TiN coatings prepared over a range of process parameters using the activated reactive evaporation process. The composition was measured by Auger electron spectroscopy. The phase relationships and preferred orientation were obtained by x-ray diffraction analysis. Microhardness and adhesion of the coatings were measured. The results show that the microhardness depends on the composition/stoichiometry, phases present, the preferred orientation, and possibly the grain size in the case of single-phase coatings.
Research Organization:
University of California, Los Angeles, California 90024
OSTI ID:
6511981
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
Country of Publication:
United States
Language:
English