Method and apparatus for monitoring laser processes
Patent
·
OSTI ID:6507806
An apparatus is described for monitoring a laser process which delivers energy from a laser source to a work piece along a process path while producing a plasma or flame at a beam delivery point along the path, comprising: a laser source; infrared radiation detection means for receiving infrared radiation at a point behind and in close proximity to the beam delivery point. The infrared radiation detects means producing electrical signals responsive to the intensity of infrared radiation impinging on the detection means; comparison means receiving the electrical signals representative of the infrared radiation and comparing the signals to a predetermined window value; means operatively associated with the comparison means for signalling when the electrical signals are not within the window value; and work piece reprocessing means operatively associated with the signalling means for reprocessing the work piece.
- Assignee:
- Spectra-Physics, Inc., San Jose, CA
- Patent Number(s):
- US 4663513
- OSTI ID:
- 6507806
- Country of Publication:
- United States
- Language:
- English
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