The emittance and brightness characteristics of negative ion sources suitable for MeV ion implantation
Conference
·
OSTI ID:6495303
This paper provides the description and beam properties of ion sources suitable for use with ion implantation devices. Particular emphasis is placed on the emittance and brightness properties of state-of-the-art, high intensity, negative ion sources based on the cesium ion sputter principle. (WRF)
- Research Organization:
- Oak Ridge National Lab., TN (USA)
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 6495303
- Report Number(s):
- CONF-8706112-1; ON: DE87010377
- Country of Publication:
- United States
- Language:
- English
Similar Records
The emittances and brightnesses of high-intensity negative ion sources
Emittance characteristics of negative ion beams generated by the sputter technique
Emittance characteristics of negative ion beams generated by the sputter technique
Conference
·
Wed Dec 31 23:00:00 EST 1986
·
OSTI ID:6397861
Emittance characteristics of negative ion beams generated by the sputter technique
Conference
·
Sat Dec 31 23:00:00 EST 1988
·
OSTI ID:5908759
Emittance characteristics of negative ion beams generated by the sputter technique
Conference
·
Sun Dec 31 23:00:00 EST 1989
· Review of Scientific Instruments; (USA)
·
OSTI ID:6904212
Related Subjects
36 MATERIALS SCIENCE
360601 -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANIONS
BEAM EMITTANCE
BRIGHTNESS
CHARGED PARTICLES
ION IMPLANTATION
ION SOURCES
IONS
OPTICAL PROPERTIES
PERFORMANCE TESTING
PHYSICAL PROPERTIES
SPUTTERING
TESTING
360601 -- Other Materials-- Preparation & Manufacture
42 ENGINEERING
420800 -- Engineering-- Electronic Circuits & Devices-- (-1989)
640301* -- Atomic
Molecular & Chemical Physics-- Beams & their Reactions
656002 -- Condensed Matter Physics-- General Techniques in Condensed Matter-- (1987-)
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANIONS
BEAM EMITTANCE
BRIGHTNESS
CHARGED PARTICLES
ION IMPLANTATION
ION SOURCES
IONS
OPTICAL PROPERTIES
PERFORMANCE TESTING
PHYSICAL PROPERTIES
SPUTTERING
TESTING