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Hydrogen desorption from chemical vapor deposited diamond films

Journal Article · · Journal of Applied Physics; (United States)
DOI:https://doi.org/10.1063/1.358642· OSTI ID:6493441
; ; ;  [1]
  1. Org. 8342, Sandia National Laboratories, P. O. Box, 969, Livermore, California 94551 (United States)

Temperature programmed desorption was used to measure the desorption kinetics of hydrogen and its isotopes from chemical vapor deposited diamond surfaces. The desorption spectra are surprisingly simple considering the polycrystalline nature of the sample, exhibiting a single peak at [similar to]1300 K for a heating rate of 6 K/s. There is no isotope effect to the desorption, and neither the position of the peak maximum nor the peak width change with increasing hydrogen coverage. The maximum surface coverage achieved is approximately one monolayer. The spectra can be represented by a single peak first order desorption model, yielding kinetic parameters of [ital E][sub [ital a]]=51 kcal/mol and [nu]=5[times]10[sup 7] s[sup [minus]1]. An alternate model of multiple desorption sites with a Gaussian-distributed population gives kinetic parameters of [ital E][sub [ital a],mean]=82 kcal/mol, [nu]=9[times]10[sup 12] s[sup [minus]1], and [sigma] (the width of the Gaussian distribution)=3 kcal/mol. A comparison to desorption from low-index natural diamond surfaces is presented.

DOE Contract Number:
AC04-76DP00789
OSTI ID:
6493441
Journal Information:
Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 77:7; ISSN JAPIAU; ISSN 0021-8979
Country of Publication:
United States
Language:
English