Hydrogen desorption from chemical vapor deposited diamond films

Journal Article · Sat Apr 01 04:00:00 EST 1995 · Journal of Applied Physics; (United States)

DOI:https://doi.org/10.1063/1.358642· OSTI ID:6493441

Schulberg, M T; Fox, C A; Kubiak, G D; Stulen, R H ^[1]

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1. Org. 8342, Sandia National Laboratories, P. O. Box, 969, Livermore, California 94551 (United States)

Temperature programmed desorption was used to measure the desorption kinetics of hydrogen and its isotopes from chemical vapor deposited diamond surfaces. The desorption spectra are surprisingly simple considering the polycrystalline nature of the sample, exhibiting a single peak at [similar to]1300 K for a heating rate of 6 K/s. There is no isotope effect to the desorption, and neither the position of the peak maximum nor the peak width change with increasing hydrogen coverage. The maximum surface coverage achieved is approximately one monolayer. The spectra can be represented by a single peak first order desorption model, yielding kinetic parameters of [ital E][sub [ital a]]=51 kcal/mol and [nu]=5[times]10[sup 7] s[sup [minus]1]. An alternate model of multiple desorption sites with a Gaussian-distributed population gives kinetic parameters of [ital E][sub [ital a],mean]=82 kcal/mol, [nu]=9[times]10[sup 12] s[sup [minus]1], and [sigma] (the width of the Gaussian distribution)=3 kcal/mol. A comparison to desorption from low-index natural diamond surfaces is presented.

• DOE Contract Number: AC04-76DP00789
• OSTI ID: 6493441
• Journal Information: Journal of Applied Physics; (United States), Journal Name: Journal of Applied Physics; (United States) Vol. 77:7; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360606* -- Other Materials-- Physical Properties-- (1992-)
AUGER ELECTRON SPECTROSCOPY
CARBON
CHEMICAL COATING
CHEMICAL VAPOR DEPOSITION
DEPOSITION
DESORPTION
DIAMONDS
ELECTRON MICROSCOPY
ELECTRON SPECTROSCOPY
ELEMENTAL MINERALS
ELEMENTS
FILMS
HYDROGEN
ISOTOPE EFFECTS
MICROSCOPY
MINERALS
NONMETALS
RAMAN SPECTRA
SCANNING ELECTRON MICROSCOPY
SORPTION
SPECTRA
SPECTROSCOPY
SURFACE COATING
SURFACES
THIN FILMS