Laser writing of superconducting patterns on YBa sub 2 Cu sub 3 O sub x films

Journal Article · Mon Sep 10 04:00:00 EDT 1990 · Applied Physics Letters; (USA)

DOI:https://doi.org/10.1063/1.104222· OSTI ID:6484496

Dye, R C; Muenchausen, R E; Nogar, N S ^[1]; Mukherjee, A; Brueck, S R.J. ^[2]

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1. Los Alamos National Laboratory, Los Alamos, NM (USA)
2. Center for High Technology Materials, University of New Mexico, Albuquerque, NM (USA)

A novel process for the direct laser writing of thin-film high {Tc} patterns is demonstrated. The process consists of deposition of a high quality film (308 nm laser ablation from a YBa{sub 2}Cu{sub 3}O{sub {ital x}} target with a 750 {degree}C substrate temperature and a 150 mTorr O{sub 2} ambient), annealing in an inert atmosphere (Ar at 400 {degree}C for 5--20 min) to reduce the oxygen content and depress or eliminate the superconducting transition temperature, and direct-write laser heating (1.06 {mu}m at {approx}0.5 kW/cm{sup 2} for {approx}5 min) in an oxygen atmosphere at {approx}590 Torr to selectively regenerate the high {Tc} material. rf eddy current and four-point resistivity probe results confirm this process for both SrTiO{sub 3} and LaAlO{sub 3} substrates. Scanning electron micrographs indicate that this is a very mild processing sequence with no observable changes in film morphology.

• OSTI ID: 6484496
• Journal Information: Applied Physics Letters; (USA), Journal Name: Applied Physics Letters; (USA) Vol. 57:11; ISSN APPLA; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360202* -- Ceramics
Cermets
& Refractories-- Structure & Phase Studies
ABLATION
ALKALINE EARTH METAL COMPOUNDS
ANNEALING
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
CHEMICAL REACTIONS
COPPER COMPOUNDS
COPPER OXIDES
DEPOSITION
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTROMAGNETIC RADIATION
FILMS
HEAT TREATMENTS
HIGH-TC SUPERCONDUCTORS
LASER RADIATION
LASL
NATIONAL ORGANIZATIONS
OXIDATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
RADIATIONS
SUPERCONDUCTING FILMS
SUPERCONDUCTIVITY
SUPERCONDUCTORS
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
TRANSITION TEMPERATURE
US AEC
US DOE
US ERDA
US ORGANIZATIONS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES