Molybdenum deposition from the decomposition of molybdenum hexacarbonyl

Journal Article · Sat Apr 15 04:00:00 EDT 1989 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.342695· OSTI ID:6482478

Cho, C C; Bernasek, S L

Molybdenum metal deposition from the decomposition of Mo(CO)/sub 6/ adsorbed on Si(100), Mo, and Cu surfaces was studied by x-ray photoelectron spectroscopy (XPS), Auger electron spectroscopy, thermal desorption spectroscopy, and low-energy electron diffraction. Pyrolytic, photolytic, and electron-induced Mo(CO)/sub 6/ decomposition were observed and indicated different dissociation mechanisms. Thermally decomposed Mo(CO)/sub 6/ was found to leave metallic Mo in the presence of C and O. Electron-induced decomposition resulted in the formation of molybdenum carbide on the surfaces. Ultraviolet (UV) irradiation of adsorbed Mo(CO)/sub 6/ induced new peaks in XPS and TDS spectra, suggesting the formation of an unsaturated molybdenum carbonyl adsorbate. Mo(CO)/sub 6/ was found to form a multilayer on these surfaces at low temperatures, and desorb with zero-order kinetics. Although both adsorbate desorption and decomposition took place when the samples were heated, desorption was the dominant reaction path. UV irradiation of gaseous and coadsorbed Mo(CO)/sub 6/ and O/sub 2/ was also investigated. UV irradiation of the gas-phase mixture leads to MoO/sub 2/ and MoO/sub 3/ deposition; however, UV irradiation of coadsorbed Mo(CO)/sub 6/ and O/sub 2/ resulted in unsaturated molybdenum carbonyl. The effects of annealing and Ar/sup +/ bombardment on the Mo-deposited Si(100) surface are also reported.

• Research Organization: Department of Chemistry, Princeton University, Princeton, New Jersey 08544
• OSTI ID: 6482478
• Journal Information: J. Appl. Phys.; (United States), Journal Name: J. Appl. Phys.; (United States) Vol. 65:8; ISSN JAPIA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360102* -- Metals & Alloys-- Structure & Phase Studies
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400201 -- Chemical & Physicochemical Properties
AUGER ELECTRON SPECTROSCOPY
CARBONYLS
CHEMICAL COATING
CHEMICAL REACTIONS
CHEMICAL VAPOR DEPOSITION
CHEMISORPTION
COATINGS
COHERENT SCATTERING
COLLISIONS
DECOMPOSITION
DEPOSITION
DIFFRACTION
ELECTRON COLLISIONS
ELECTRON DIFFRACTION
ELECTRON SPECTROSCOPY
ELEMENTS
METALS
MOLYBDENUM
ORGANIC COMPOUNDS
ORGANOMETALLIC COMPOUNDS
PHOTOCHEMICAL REACTIONS
PHOTOELECTRON SPECTROSCOPY
SCATTERING
SEMIMETALS
SEPARATION PROCESSES
SILICON
SORPTION
SPECTROSCOPY
SUBSTRATES
SURFACE COATING
SURFACE PROPERTIES
TRANSITION ELEMENTS