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Electron energy distribution functions (EEDF) and electrical characteristics of the positive column of a glow discharge in Ar and an Ar+Cl/sub 2/ mixture

Journal Article · · High Temp. (Engl. Transl.); (United States)
OSTI ID:6477192
This paper gives the results of an experimental investigation of the radial variation of the electron distribution function and other electrical parameters of the positive column of a glow discharge in Ar at a pressure of approx.67 Pa and discharge current 2 mA and in an Ar+Cl/sub 2/ mixture at a total gas pressure of approx.67 Pa and discharge currents 2 and 30 mA in relation to the percentage Cl/sub 2/ content in the discharge. It is found that in pure argon the proportion of high-energy electrons in the distribution function decreases significantly with increasing distance from the discharge axis. The experimental distribution is in good agreement with that calculated from the nonlocal theory of a positive column. In a discharge in Ar+Cl/sub 2/ the reduction of fast electrons in the EEDF over the discharge tube radius is much less pronounced than in Ar. It is shown that the change in plasma properties when Cl/sub 2/ is added is due to the formation of negative ions in the discharge.
Research Organization:
Ivanovo Chemical Technology Institute
OSTI ID:
6477192
Journal Information:
High Temp. (Engl. Transl.); (United States), Journal Name: High Temp. (Engl. Transl.); (United States) Vol. 18:5; ISSN HITEA
Country of Publication:
United States
Language:
English