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Quantum interference devices made from superconducting oxide thin films

Journal Article · · Appl. Phys. Lett.; (United States)
DOI:https://doi.org/10.1063/1.98922· OSTI ID:6474777

We have fabricated superconducting quantum interference devices (dc SQUID's) from thin films of the superconducting oxide YBa/sub 2/Cu/sub 3/O/sub y/. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 ..mu..m loop and two 17-..mu..m-wide weak links over a --1-..mu..m-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID's. The SQUID's were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.

Research Organization:
IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
OSTI ID:
6474777
Journal Information:
Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:3; ISSN APPLA
Country of Publication:
United States
Language:
English

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