Quantum interference devices made from superconducting oxide thin films

Journal Article · Mon Jul 20 04:00:00 UTC 1987 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.98922· OSTI ID:6474777

Koch, R H; Umbach, C P; Clark, G J; Chaudhari, P; Laibowitz, R B

We have fabricated superconducting quantum interference devices (dc SQUID's) from thin films of the superconducting oxide YBa/sub 2/Cu/sub 3/O/sub y/. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 ..mu..m loop and two 17-..mu..m-wide weak links over a --1-..mu..m-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID's. The SQUID's were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.

• Research Organization: IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598
• OSTI ID: 6474777
• Journal Information: Appl. Phys. Lett.; (United States), Journal Name: Appl. Phys. Lett.; (United States) Vol. 51:3; ISSN APPLA
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360204 -- Ceramics
Cermets
& Refractories-- Physical Properties
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656100 -- Condensed Matter Physics-- Superconductivity
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
BARIUM OXIDES
CHALCOGENIDES
COPPER COMPOUNDS
COPPER OXIDES
ELECTRONIC EQUIPMENT
EQUIPMENT
FABRICATION
FILMS
FLUX QUANTIZATION
FLUXMETERS
ION IMPLANTATION
MEASURING INSTRUMENTS
MICROWAVE EQUIPMENT
OPERATION
OXIDES
OXYGEN COMPOUNDS
PHYSICAL RADIATION EFFECTS
RADIATION EFFECTS
SQUID DEVICES
SUPERCONDUCTING DEVICES
SUPERCONDUCTING FILMS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
YTTRIUM OXIDES