Simple, high current, antimony ion source
Journal Article
·
· Rev. Sci. Instrum.; (United States)
A simple metal ion source capable of producing a continuous, uncontaminated, high current beam of Sb ions is presented. It produced a total ion current of 200 ..mu..A at 1 kV extraction voltage. A discharge occurred in the source at a pressure of 6 x 10/sup -4/ Torr. The ion current extracted from the source increased with the 3/2 power of the extraction voltage. The perveance of the source and ion density in the plasma were 8 x 10/sup -9/ and 1.8 x 10/sup 11/ cm/sup -3/, respectively.
- Research Organization:
- Ibaraki Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation, Tokai, Ibaraki-ken, 319-11, Japan
- OSTI ID:
- 6466904
- Journal Information:
- Rev. Sci. Instrum.; (United States), Journal Name: Rev. Sci. Instrum.; (United States) Vol. 50:1; ISSN RSINA
- Country of Publication:
- United States
- Language:
- English
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