Mechanical strength and tribological behavior of ion-beam deposited boron nitride films on non-metallic substrates

Conference · Thu Jan 01 04:00:00 EST 1987

OSTI ID:6452665

Miyoshi, K; Buckley, D H; Pouch, J J; Alterovitz, S A; Sliney, H E

An investigation was conducted to examine the mechanical strength and tribological properties of boron nitride (BN) films ion-beam deposited on silicon (Si), fused silica (SiO/sub 2/), gallium arsenide (GaAs), and indium phosphide (InP) substrates in sliding contact with a diamond pin under a load. The results of the investigation indicate that BN films on nonmetallic substrates, like metal films on metallic substrates, deform elastically and plastically in the interfacial region when in contact with a diamond pin. However, unlike metal films and substrates, BN films on nonmetallic substrates can fracture when they are critically loaded. Not only does the yield pressure (hardness) of Si and SiO/sub 2/ substrates increase by a factor of 2 in the presence of a BN film, but the critical load needed to fracture increases as well. The presence of films on the brittle substrates can arrest crack formation. The BN film reduces adhesion and friction in the sliding contact. BN adheres to Si and SiO/sub 2/ and forms a good quality film, while it adheres poorly to GaAs and InP. The interfacial adhesive strengths were 1 GPa for a BN film on Si and appreciably higher than 1 GPa for a BN film on SiO/sub 2/.

• Research Organization: National Aeronautics and Space Administration, Cleveland, OH (USA). Lewis Research Center
• OSTI ID: 6452665
• Report Number(s): N-87-18668; NASA-TM-89818; E-3439; NAS-1.15:89818; CONF-870388-8
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360203* -- Ceramics
Cermets
& Refractories-- Mechanical Properties
ARSENIC COMPOUNDS
ARSENIDES
BEAMS
BORON COMPOUNDS
BORON NITRIDES
CHALCOGENIDES
DATA
ELEMENTS
EXPERIMENTAL DATA
GALLIUM ARSENIDES
GALLIUM COMPOUNDS
INDIUM COMPOUNDS
INDIUM PHOSPHIDES
INFORMATION
ION BEAMS
MECHANICAL PROPERTIES
NITRIDES
NITROGEN COMPOUNDS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PNICTIDES
SEMIMETALS
SILICON
SILICON COMPOUNDS
SILICON OXIDES
SUBSTRATES
TRIBOLOGY