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Photon stimulated desorption from a vacuum chamber at the National Synchrotron Light Source

Journal Article · · J. Vac. Sci. Technol., A; (United States)
DOI:https://doi.org/10.1116/1.574451· OSTI ID:6448903

In our search for surfaces exhibiting the lowest photon stimulated desorption, we have exposed a 3-m-long beam tube to photons from the vacuum ultraviolet ring of the National Synchrotron Light Source having critical energy of --500 eV. Desorption of H/sub 2/, CH/sub 4/, CO, and CO/sub 2/, which are the main gas species, was studied as a function of the beam dose for the following surface treatments: standard chemical cleaning, Ar 10% O/sub 2/ glow discharge, N/sub 2/ glow discharge, and radio frequency glow discharge using O/sub 2/ disassociation. In addition, we measured the desorption as a function of vertical collimator position. N/sub 2/ glow discharge treatment yielded the lowest desorption.

Research Organization:
MERL, Hitachi Ltd., Kandatsu, Tsuchiura, Ibaraki, 300 Japan
OSTI ID:
6448903
Journal Information:
J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
Country of Publication:
United States
Language:
English