Photon stimulated desorption from a vacuum chamber at the National Synchrotron Light Source
In our search for surfaces exhibiting the lowest photon stimulated desorption, we have exposed a 3-m-long beam tube to photons from the vacuum ultraviolet ring of the National Synchrotron Light Source having critical energy of --500 eV. Desorption of H/sub 2/, CH/sub 4/, CO, and CO/sub 2/, which are the main gas species, was studied as a function of the beam dose for the following surface treatments: standard chemical cleaning, Ar 10% O/sub 2/ glow discharge, N/sub 2/ glow discharge, and radio frequency glow discharge using O/sub 2/ disassociation. In addition, we measured the desorption as a function of vertical collimator position. N/sub 2/ glow discharge treatment yielded the lowest desorption.
- Research Organization:
- MERL, Hitachi Ltd., Kandatsu, Tsuchiura, Ibaraki, 300 Japan
- OSTI ID:
- 6448903
- Journal Information:
- J. Vac. Sci. Technol., A; (United States), Journal Name: J. Vac. Sci. Technol., A; (United States) Vol. 5:4; ISSN JVTAD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
420200* -- Engineering-- Facilities
Equipment
& Techniques
ACCELERATORS
ALKANES
ALLOYS
BREMSSTRAHLUNG
CARBON COMPOUNDS
CARBON DIOXIDE
CARBON MONOXIDE
CARBON OXIDES
CHALCOGENIDES
CHROMIUM ALLOYS
CLEANING
CORROSION RESISTANT ALLOYS
CYCLIC ACCELERATORS
DESORPTION
DISSOCIATION
ELECTRIC DISCHARGES
ELECTROMAGNETIC RADIATION
ELEMENTS
GLOW DISCHARGES
HYDROCARBONS
HYDROGEN
IRON ALLOYS
IRON BASE ALLOYS
METHANE
NONMETALS
NSLS
ORGANIC COMPOUNDS
OXIDES
OXYGEN
OXYGEN COMPOUNDS
PUMPING
RADIATION SOURCES
RADIATIONS
SORPTIVE PROPERTIES
STAINLESS STEELS
STEELS
SURFACE CLEANING
SURFACE FINISHING
SURFACE PROPERTIES
SURFACE TREATMENTS
SYNCHROTRON RADIATION
SYNCHROTRON RADIATION SOURCES
SYNCHROTRONS
TESTING
VACUUM SYSTEMS