Vanadium dioxide formed by the sol-gel process
Patent
·
OSTI ID:6447825
This patent describes a process for the deposition of a crystalline vanadium dioxide thin film. It comprises: providing a solution comprising a vanadium tetraalkoxide and solvent; allowing hydrolysis and condensation reactions to progressively form a homogeneous sol from the solution, applying a coating of the sol to the substrate; allowing a gel to form from the sol on the substrate by evaporating the solvent; dehydrating the gel by heat treatment under an inert atmosphere to form the crystalline vanadium dioxide film.
- Assignee:
- John Hopkins Univ., Baltimore, MD (USA)
- Patent Number(s):
- A; US 4957725
- Application Number:
- PPN: US s 7-215107
- OSTI ID:
- 6447825
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
CHALCOGENIDES
CHEMICAL REACTIONS
DECOMPOSITION
EVAPORATION
FILMS
HYDROLYSIS
LYSIS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
SOL-GEL PROCESS
SOLVOLYSIS
SYNTHESIS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM OXIDES
360201* -- Ceramics
Cermets
& Refractories-- Preparation & Fabrication
CHALCOGENIDES
CHEMICAL REACTIONS
DECOMPOSITION
EVAPORATION
FILMS
HYDROLYSIS
LYSIS
OXIDES
OXYGEN COMPOUNDS
PHASE TRANSFORMATIONS
SOL-GEL PROCESS
SOLVOLYSIS
SYNTHESIS
THIN FILMS
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM OXIDES